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Elemental composition and analysis of chemical forms of surface elements
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Molecular detection and identification of contaminants
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In-depth distribution of elements
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Chemical and molecular image in surface and in 3D
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Surface morphology and surface roughness parameters
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Non-destructive CT scanning
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Plasma FIB-SEM
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Dual Beam FIB-SEM
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SEM-EDX
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TOF-SIMS
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3D Xray (CT) Non-Destructive Imaging
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Ion Milling for SEM